传感器技术论文中英文对照资料外文翻译文献

enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low.

In semiconductor technology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on..

The Japanese horizontal river company uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing; the system helps the silicon resonance type pressure transmitter. The core partially presses two resonant Liang by the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant Liang's frequency difference correspondence different pressure, measures the pressure with the frequency difference method, may eliminate the error which factor and so on ambient temperature brings. When ambient

temperature change, two resonant Liang frequencies and the amplitude variation are same, after two frequency differences, its same change quantity can counterbalance mutually. It’s survey most high accuracy may reach 0.01%FS.

American Silicon Microstructure Inc.(SMI) the company develops a series of low ends, linear in 0.1% to 0.In 65% scope silicon micro pressure transmitter, the lowest full measuring range is 0.15psi (1KPa), it makes take the silicon as the material, has the unique three dimensional structure, the light slight

machine-finishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti- effect but to lose the bridge balance, the output and the pressure becomes the proportion the electrical signal.

Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, several 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is small surveyed, may make the blood pressure pressure transmitter.

The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series splashes thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over come the nonmetallic strain gauge easily the temperature influence insufficiency, has the high stability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly

to glue the precision which the type brought, sluggish big, shortcoming and so on slow change, had the precision high, the re-liability is high, the volume small characteristic, widely used in domain and so on aviation, petroleum, chemical industry, medical service.

Integrates the sensor the superiority is the traditional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part and send the part will integrate on together the chip, will cause it to have the calibration, to compensate, from the diagnosis and the network correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR

Corporation will develop, each week will be able to produce 10,000. The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microcomputer and the sensor

unifies, it has at the same time the examination, the judgment and the information processing function, compares with the traditional sensor has very many characteristics:

Has the judgment and the information processing function, can carry on the revision, the error to the observed value compensates, thus enhancement measuring accuracy; May realize the multi-sensor multi parameters survey; Has from the diagnosis and from the calibration function, enhances the reliability; The survey data may deposit and withdraw, easy to operate; Has the data communication interface, can and the microcomputer direct communication.

The sensor, the signal adjustment electric circuit, the monolithic integrated circuit integration forms ultra large-scale integrated on a chip the senior intelligence sensor. American HONY WELL Corporation ST-3000 intelligence sensor, the chip size only then has 3×4×2mm3, uses the semiconductor craft, makes CPU, EPROM, the static pressure, the differential pressure, the temperature on the identical chip and so on three kind of sensitive units.

The intellectualized sensor research and the development, US is at the leading position. American Space Agency when development spaceship called this kind of sensor for the clever sensor (Smart Sensor), on the spaceship this kind of sensor is

extremely important. Our country in this aspect research and development also very backward mainly is because our country semiconductor integrated circuit technological level is limited.

The sensor’s development is changing day after day since especially the 80's humanities have entered into the high industrialization the information age, sensor techno-logy to renewal, higher technological development. US, Japan and so on developed country sensor technological development quickest, our country because the foundation is weak, the sensor technology compares with these developed countries has the big disparity. Therefore, we should enlarge to the sensor engineering research, the development investment, causes our country sensor technology and the foreign disparity reduces, promotes our country

instrument measuring appliance industry and from the technical development.