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עܻĹ̼ԭԽTaguchi鷽õղŻȥڷ֣ƽڷIJŻȡ˳ɹڷļмЧʵıʮʺڴעܻոĽ
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ο οҪοСӴ־УοǰһС [1] ½ܿһĿӦ¶ȼƣƲ⼼199616(2)36~39 [2] P.BeckmanR.P.RoyV.VelidandiaM.Capizzanl An improved fast-response micro-
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ơݡ[7] Himanshu D.BhattRamakrishna Vedula VedulaSeshu B.Desu et al.La(1x)SrxCoO3 for thin film · measurements on silicon wafersSensors and Actuators A199869(1)46~52 thermocouple applicationsThin Solid Films1999350(2)249~257
[8] Himanshu D.BhattRamakrishna Vedula VedulaSeshu B.Desu etc.Thin film TiC/TaC
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[9] B.serioPh.NikaJ.P.PrenelStatic and dynamic calibration of thin-film thermocouples by means of a
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[16] ԣ⣬ȣнƱNiCr-NiSiĤȵżĶ̬оտѧ뼼1995155317320
[17] ȨĤȵżļойе̣1996753436 [18] ѦͣȨЯʽĤȵż´1996No.146~48
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